InPower Dry vane Vacuum pump used in the semiconductor industry to create a clean and dry vacuum environment. find a wide range of applications in the semiconductor industry due to their cleanliness, reliability, and efficiency. These pumps are essential for processes such as chemical vapor deposition, physical vapor deposition, ion implantation, and etching.
Features:
Dry vane Vacuum pump are a type of vacuum pump that combines the benefits of dry screw technology with water cooling to enhance performance and efficiency.It is offer a reliable, efficient, and low-maintenance solution for demanding vacuum applications that require both dry operation and effective heat dissipation.
Model：LGB30/50/70/110/150/180/200/220/270/300/360/400/500
Ultimate vacuum: ≤1Pa
SPEED 50 Hz:30～500 L/s
SPEED 60 Hz:36 - 600 L/s
|
Model |
LGB30 |
LGB50 |
LGB70 |
LGB110 |
LGB150 |
LGB180 |
LGB200 |
LGB220 |
LGB270 |
LGB300 |
LGB360 |
LGB400 |
LGB500 |
||
|
SPEED(50Hz) |
L/s |
30 |
50 |
83 |
110 |
150 |
180 |
200 |
230 |
270 |
300 |
360 |
360 |
500 |
|
|
m3/h |
110 |
180 |
300 |
400 |
540 |
650 |
720 |
830 |
970 |
1080 |
1300 |
1500 |
1800 |
||
|
Ultimate Vacuum (50Hz) |
Pa |
5 |
5 |
5 |
5 |
5 |
5 |
5 |
5 |
5 |
5 |
5 |
5 |
5 |
|
|
Maximum exhaust pressure |
bar |
1.2 |
1.2 |
1.2 |
1.2 |
1.2 |
1.2 |
1.5 |
1.2 |
1.2 |
1.2 |
1.2 |
1.2 |
1.2 |
|
|
POWER(50Hz) |
Kw |
4 |
4 |
5.5/7.5 |
11 |
15 |
15 |
18.5 |
18.5 |
22 |
30 |
37 |
37 |
37 |
|
|
Motor Speed(50Hz) |
rpm |
2880 |
2880 |
2880 |
2880 |
2880 |
2880 |
2880 |
2880 |
2880 |
2880 |
2880 |
2880 |
2880 |
|
|
Connect |
IN |
mm |
50 |
50 |
65 |
65 |
100 |
100 |
150 |
150 |
150 |
150 |
150 |
150 |
150 |
|
OUT |
mm |
40 |
40 |
65 |
65 |
80 |
80 |
100 |
100 |
100 |
100 |
100 |
100 |
100 |
|
|
Water |
Flow |
L/min |
6 |
6 |
10 |
15 |
20 |
20 |
25 |
25 |
28 |
28 |
28 |
28 |
28 |
|
Pressure |
MPa |
0.2～0.35 |
0.2～0.35 |
0.2～0.35 |
0.2～0.35 |
0.2～0.35 |
0.2～0.35 |
0.2～0.35 |
0.2～0.35 |
0.2～0.35 |
0.2～0.35 |
0.2～0.35 |
0.2～0.35 |
0.2～0.35 |
|
|
Connect |
G3/8" |
G1/2" |
G1/2" |
G1/2" |
G1/2" |
G1/2" |
G1/2" |
G1/2" |
G1/2" |
G1/2" |
G1/2" |
G1/2" |
G1/2" |
||
|
Cooling Method |
Air/Water |
Air/Water |
Water |
Water |
Water |
Water |
Water |
Water |
Water |
Water |
Water |
Water |
Water |
Water |
|
|
Noise |
dB |
75 |
75 |
75 |
76 |
76 |
78 |
78 |
78 |
80 |
80 |
85 |
85 |
85 |
|
|
Weight |
Kg |
310 |
310 |
475 |
570 |
840 |
840 |
1200 |
1220 |
1250 |
1300 |
1350 |
1380 |
1400 |
|
|
Special Requirements |
According to requirements, it can be configured with variable frequency, anti-corrosion, explosion-proof, etc |
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inPower Dry vane Vacuum pump Application area:
Semiconductor Manufacturing:
In semiconductor fabrication processes such as CVD, PVD, ion implantation, and etching, water-cooled dry screw vacuum pumps help maintain the required vacuum levels while offering efficient heat dissipation to ensure consistent performance.
Thin Film Deposition:
Water-cooled dry screw pumps are used in thin film deposition techniques like sputtering and evaporation, where precise vacuum control and heat management are essential for depositing uniform thin films on substrates.
Heat Treatment Processes:
Industries involved in heat treatment processes, such as metallurgy and aerospace, rely on water-cooled dry screw vacuum pumps to create vacuum environments for annealing, brazing, and other high-temperature treatments while keeping the system cool.
Chemical and Pharmaceutical Processing:
Water-cooled dry screw pumps play a crucial role in chemical processing applications where maintaining a clean, dry vacuum is necessary for reactions, distillation, and solvent recovery processes.
Research and Development:
Laboratories and research facilities across various industries use water-cooled dry screw vacuum pumps for testing and experimentation, providing reliable vacuum conditions for studying materials, processes, and equipment.
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