Zero Leakage Magnetic Drive Roots Booster

The Zero Leakage Magnetic Drive Roots Booster utilizes a hermetically sealed magnetic transmission to transfer torque between the motor and the pumping chamber. By eliminating conventional dynamic shaft seals, this design removes the primary leakage path inherent in standard mechanical-drive boosters, preventing process gas contamination and atmosphere ingress.

Engineered as a high-capacity booster for primary backing pumps, this system optimizes pumping speed and ultimate vacuum performance across semiconductor, chemical, metallurgy, and industrial coating processes.

The following parameters serve as the baseline for technical evaluation and model selection:

Elimination of Dynamic Shaft Seals
Standard Roots boosters rely on dynamic mechanical shaft seals, which gradually wear down due to friction, thermal expansion, and chemical degradation.
The magnetic drive system eliminates this failure point by utilizing a static containment shell (canister):
Torque Transmission: External magnets drive internal magnets through a solid, non-magnetic barrier without direct contact.
Hermetic Sealing: Converts a dynamic seal into a static seal arrangement, eliminating shaft leakage and protecting process purity.
Measurable Leakage Standards
In high-vacuum engineering, "zero leakage" refers to a strict, measurable acceptance standard rather than an unverified marketing claim.
Quality Guarantee: Every unit is factory-tested under dynamic vacuum using Helium Mass Spectrometer Leak Detectors (HMSLD) to confirm compliance with helium leak rate limits3. . Test certificates are included with dispatch documentation.

The magnetic drive booster is ideal for applications requiring strict gas containment, toxic material isolation, or ultra-clean conditions:
Semiconductor & Electronics: PVD/CVD deposition, etching, crystal pulling, and wafer processing involving high-purity or reactive gases.
Chemical & Pharmaceutical Processing: Solvent recovery, vacuum distillation, thermal degassing, and aggressive vapor extraction.
Vacuum Coating & Metallurgy: Optical coating, electron-beam welding, vacuum induction melting (VIM), and industrial heat treatment furnaces.
High-Value Gas Recovery: Closed-loop recirculation of rare or expensive gases, including Helium (He), Argon (Ar), and Sulfur Hexafluoride (SF6).

Selecting the optimal Roots booster requires evaluating the entire vacuum system rather than relying solely on nominal pumping speed.
Calculate Target Pumping Speed: Determine the effective speed based on total chamber volume, required evacuation time, process gas flow, and system outgassing.
Backing Pump Matching: Ensure the backing pump provides sufficient throughput to handle the discharge from the booster without exceeding the maximum differential pressure limits.
Process Media Review: Identify corrosive, toxic, condensable, or particulate-laden gases to select appropriate rotor coatings (such as PTFE or nickel plating), gas ballast configurations, or inlet filtration units.

Precision Machining: CNC profile milling maintains ultra-tight rotor-to-housing clearances, optimizing volumetric efficiency without mechanical contact.
Dynamic Balancing: Rotors undergo dynamic balancing to ISO 1940 G1.0 standards to ensure low vibration and long bearing lifetime.
Coupling Safety: Magnetic drive assemblies are thermal-stress-tested to ensure zero slippage under full operation load.

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